Apreo

The most feature rich high-performance SEM

Apreo composite lenses combine electrostatic and magnetic immersion techniques to produce unprecedented high resolution and material contrast.

Apreo is an ideal platform for studying nanoparticles, catalysts, powders, and nanodevices without compromising the performance of magnetic samples. Traditional high-resolution SEM lens technology can be divided into two categories: magnetic immersion or electrostatic. For the first time, FEI combines two technologies into one instrument. The results generated by this approach far exceed the individual performance of any type of lens barrel. Both techniques form small probes with electron beams to improve resolution at low voltages and allow signal electrons to enter the tube. By combining magnetic and electrostatic lenses into a composite lens, not only has the resolution been improved, but unique signal filtering options have also been added. The resolution of the electrostatic magnetic composite final lens at 1 kV voltage is 1.0 nm (without electron beam reduction or monochromator).

Apreo has an in lens backscatter detector T1 located close to the sample to collect as many signals as possible, ensuring data collection in a very short amount of time. Unlike other backscatter detectors, this fast detector always ensures good material contrast, including when navigating, tilting, or working at short distances. On sensitive samples, the value of the detector is highlighted, as it can provide clear backscatter images even with currents as low as a few pA. The composite final lens achieves more accurate material contrast and charge free imaging of insulating samples through energy filtering, further extending the potential value of T1 BSE detectors. It also offers popular options to supplement its detection capabilities, such as directional backscatter detectors (DBS), STEM 3+, and low vacuum gas analysis detectors (GAD). All of these detectors have unique software controlled segmentation capabilities to select the most valuable sample information based on demand.

Each Apreo is equipped with various strategies for processing insulation samples according to standards, including high vacuum technology such as SmartSCAN ™、 Drift compensation frame integration (DCFI) and charge filtering. For the most challenging applications, Apreo can provide charge mitigation strategies. This includes an optional low vacuum (up to 500 Pa) strategy, which can alleviate charges on any sample and provide excellent resolution and large analysis current through a field validated mirror type differential pumping mechanism and dedicated low vacuum detector.

As the use of analytical techniques becomes increasingly routine, the Apreo warehouse has been redesigned to better support different accessories and experiments. The warehouse can accommodate up to three EDS/WDS ports, enabling fast and sensitive X-ray measurements, coplanar EDS/EBSD/TKD alignment, and compatibility with (frozen) CL, Raman, EBIC, and other technologies.

All of these features can be obtained through simple sample processing and familiar xT UI, saving time for new and expert users. The customizable user interface provides numerous user guidance, automation, and remote operation options.